Dr. Sergii A. Komarov
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 28 August 2003
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Electron beam lithography, Electron beams, Etching, Quartz, Chemistry, Scanning electron microscopy, Photomasks, Helium, Critical dimension metrology, Reactive ion etching

Proceedings Article | 1 August 2002
Proc. SPIE. 4754, Photomask and Next-Generation Lithography Mask Technology IX
KEYWORDS: Electron beam lithography, Cadmium, Etching, Dry etching, Scanning electron microscopy, Photomasks, Optical proximity correction, Critical dimension metrology, Photoresist processing, Chemically amplified resists

Proceedings Article | 19 November 1999
Proc. SPIE. 3983, Sixth International Symposium on Atmospheric and Ocean Optics
KEYWORDS: Radar, Statistical analysis, Radio optics, Polarization, Synthetic aperture radar, Image segmentation, Artificial neural networks, Image classification, Analytical research, Neurons

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