Dr. Seth Kruger
PhD Student at Univ at Albany
SPIE Involvement:
Publications (7)

Proceedings Article | 20 March 2012 Paper
Proceedings Volume 8325, 832514 (2012) https://doi.org/10.1117/12.917015
KEYWORDS: Amplifiers, Fluorine, Line edge roughness, Extreme ultraviolet lithography, Lithography, Polymers, Photoresist materials, Polymerization, Temperature metrology, Extreme ultraviolet

Proceedings Article | 20 March 2012 Paper
Kenji Hosoi, Brian Cardineau, William Earley, Seth Kruger, Koichi Miyauchi, Robert Brainard
Proceedings Volume 8325, 83251S (2012) https://doi.org/10.1117/12.917018
KEYWORDS: Polymers, Amplifiers, Line edge roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Diffusion, Glasses, Molecules, Neck

Proceedings Article | 8 April 2011 Paper
Chimaobi Mbanaso, Seth Kruger, Craig Higgins, Yashdeep Khopkar, Alin Antohe, Brian Cardineau, Gregory Denbeaux
Proceedings Volume 7969, 79692J (2011) https://doi.org/10.1117/12.879507
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Polymers, Photoresist materials, Spectroscopy, Lithography, Polymer thin films, Diffusion, Surface conduction electron emitter displays, Ultraviolet radiation

Proceedings Article | 1 April 2009 Paper
Proceedings Volume 7273, 72733Q (2009) https://doi.org/10.1117/12.814308
KEYWORDS: Amplifiers, Line edge roughness, Lithography, Extreme ultraviolet lithography, Molecules, Oxygen, Thermal modeling, Thermodynamics, Photoresist materials, Polymers

Proceedings Article | 15 April 2008 Paper
Seth Kruger, Srividya Revuru, Shao-Zhong Zhang, Dimitri Vaughn, Eric Block, Paul Zimmerman, Robert Brainard
Proceedings Volume 6923, 69231O (2008) https://doi.org/10.1117/12.772994
KEYWORDS: Absorbance, Refractive index, Water, Sulfur, Oxygen, Refraction, Liquids, Argon, Potassium, Lithography

Showing 5 of 7 publications
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