Seul-Gi Kim
Engineer at Sungkyunkwan Univ
SPIE Involvement:
Author
Area of Expertise:
graphene synthesis , EUV pellicle , nano graphite film preparation , film deposition and crystallization
Publications (1)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Thermography, Thin films, Lithography, Graphene, Crystals, Silicon, Hydrogen, Infrared lasers, Pellicles, Silicon films, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography

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