Seung-Hun Oh
at Korea Electronics Technology Institution
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 6 September 2019
OE Vol. 58 Issue 09

Proceedings Article | 16 February 2010
Proc. SPIE. 7605, Optoelectronic Integrated Circuits XII
KEYWORDS: Fabrication, Electron beam lithography, Polymethylmethacrylate, Waveguides, Etching, Polymers, Image processing, Silicon, Photonic crystals, Nanoimprint lithography

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