Dr. Seung-Hune Yang
Master(VP of Technology) at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Conference Program Committee | Author
Publications (31)

SPIE Journal Paper | 26 May 2024
JM3, Vol. 23, Issue 02, 021303, (May 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.2.021303
KEYWORDS: Transformers, Visualization, Inspection, Design, Performance modeling, Image classification, Defect detection, Optical proximity correction, Education and training, Deep learning

Proceedings Article | 10 April 2024 Presentation + Paper
Yeongchan Cho, Seongjeon Choi, Wonchan Lee, Hungbae Ahn, Sangoh Park, Dongho Kim, Seunghune Yang
Proceedings Volume 12953, 129530D (2024) https://doi.org/10.1117/12.3010633
KEYWORDS: Principal component analysis, Photoresist materials, Machine learning, Product development, Optical lithography, Yield improvement, Failure analysis, Design

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12751, 1275109 (2023) https://doi.org/10.1117/12.2685488
KEYWORDS: Transformers, Visualization, Design and modelling, Deep learning, Image classification, Data modeling

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 124990C (2023) https://doi.org/10.1117/12.2657880
KEYWORDS: Etching, Data modeling, Modeling, Machine learning, Design and modelling, Statistical modeling, Optical proximity correction, Reflection, Feature extraction, Artificial intelligence

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12495, 124951S (2023) https://doi.org/10.1117/12.2658321
KEYWORDS: Optical proximity correction, Machine learning, Artificial neural networks

Showing 5 of 31 publications
Conference Committee Involvement (2)
Photomask Technology 2024
29 September 2024 | Monterey, California, United States
Photomask Technology 2023
2 October 2023 | Monterey, California, United States
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