Micro/nanoscale diamond cutting tools used in ultra-precision machining can be fabricated by precision grinding, but it is hard to fabricate a tool with a nanometric cutting edge and complex configurations. High-precision geometry accuracy and special shapes for microcutting tools with sharp edges can be achieved by FIB milling. Because the FIB milling method induces much smaller machining stress compared with conventional precision grinding methods. In this study, the FIB milling characteristics of single-crystal diamond were investigated, along with methods for decreasing the FIB-induced damage on diamond tools. Lift-off process method and Pt(Platinum) coating process method with FIB milling were investigated to reduce the damage layer on diamond substrate and quadrilateral-shaped single-crystal diamond cutting tool with cutting edge width under 500 nm were obtained.