Dr. Seungduk Cho
at Kumho Petrochemical Co., Ltd.
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Chemical species, Polymers, Diffusion, Amplifiers, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Sodium, Semiconducting wafers, Yield improvement

Proceedings Article | 8 April 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Lithography, Polymers, Silicon, Diffusion, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers, Edge roughness

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Monochromatic aberrations, Contamination, Polymers, Particles, Coating, Photoresist materials, Solids, Excimer lasers, Semiconducting wafers

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Etching, Dry etching, Polymers, Glasses, Resistance, Electroluminescence, Photoresist materials, Photomasks, Critical dimension metrology, Adhesives

Proceedings Article | 14 May 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Monochromatic aberrations, Optical lithography, Etching, Dry etching, Polymers, Glasses, Resistance, Electroluminescence, Photoresist processing

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top