Dr. Seungmin Hyun
Research Associate at Lehigh Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Thin films, Sensors, Electrodes, Metals, Composites, Silicon, Silicon films, Aluminum, Semiconducting wafers, Temperature metrology

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