Mr. Severin Waldis
at Carl Zeiss SMT GmbH
SPIE Involvement:
Conference Program Committee | Author
Publications (16)

PROCEEDINGS ARTICLE | November 21, 2017
Proc. SPIE. 10566, International Conference on Space Optics — ICSO 2008
KEYWORDS: Actuators, Mirrors, Aerospace engineering, Polymers, Spectroscopy, Wavefronts, Microopto electromechanical systems, Micromirrors, Astronomical instrumentation, Molybdenum

PROCEEDINGS ARTICLE | November 21, 2017
Proc. SPIE. 10567, International Conference on Space Optics — ICSO 2006
KEYWORDS: Actuators, Mirrors, Aerospace engineering, Electrodes, Polymers, Deformable mirrors, Space telescopes, Microopto electromechanical systems, Micromirrors, Molybdenum

PROCEEDINGS ARTICLE | July 20, 2010
Proc. SPIE. 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation
KEYWORDS: Mirrors, Electrodes, Silicon, Space telescopes, Micromirrors, Astronomical imaging, Infrared telescopes, Molybdenum, Spectroscopes, Cryogenics

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Mirrors, Electrodes, Silicon, Space telescopes, Micromirrors, Microfabrication, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Telescopes, Mirrors, Electrodes, Silicon, Space telescopes, Micromirrors, Optical alignment, Astronomical imaging, Molybdenum, Cryogenics

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Microelectromechanical systems, Mirrors, Femtosecond phenomena, Ultraviolet radiation, Phase shift keying, Micromirrors, Deep reactive ion etching, Pulse shaping, Femtosecond pulse shaping, Amplitude modulation

Showing 5 of 16 publications
Conference Committee Involvement (1)
Zinc Oxide Materials and Devices IV
25 January 2009 | San Jose, California, United States
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