Severin Waldis
at Carl Zeiss SMT GmbH
SPIE Involvement:
Publications (16)

Proceedings Article | 21 November 2017 Open Access Paper
Proceedings Volume 10566, 1056608 (2017)
KEYWORDS: Mirrors, Microopto electromechanical systems, Micromirrors, Actuators, Polymers, Astronomical instrumentation, Aerospace engineering, Molybdenum, Wavefronts, Spectroscopy

Proceedings Article | 21 November 2017 Open Access Paper
Frédéric Zamkotsian, Arnaud Liotard, Patrick Lanzoni, Kacem ElHadi, Severin Waldis, Wilfried Noell, Nico de Rooij, Veronique Conedera, Norbert Fabre, Sylvaine Muratet, Henri Camon
Proceedings Volume 10567, 105672P (2017)
KEYWORDS: Actuators, Mirrors, Micromirrors, Microopto electromechanical systems, Polymers, Space telescopes, Aerospace engineering, Molybdenum, Deformable mirrors, Electrodes

Proceedings Article | 20 July 2010 Paper
Proceedings Volume 7739, 77394Q (2010)
KEYWORDS: Micromirrors, Electrodes, Mirrors, Molybdenum, Cryogenics, Astronomical imaging, Spectroscopes, Space telescopes, Silicon, Infrared telescopes

Proceedings Article | 17 February 2010 Paper
Proceedings Volume 7594, 75940P (2010)
KEYWORDS: Micromirrors, Mirrors, Electrodes, Semiconducting wafers, Molybdenum, Microfabrication, Cryogenics, Astronomical imaging, Space telescopes, Silicon

Proceedings Article | 24 February 2009 Paper
Proceedings Volume 7208, 72080K (2009)
KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Silicon, Astronomical imaging, Space telescopes, Telescopes, Molybdenum, Optical alignment

Showing 5 of 16 publications
Conference Committee Involvement (1)
Zinc Oxide Materials and Devices IV
25 January 2009 | San Jose, California, United States
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