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Shahin Bagheri
at Univ Stuttgart
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Publications (1)
SPIE Journal Paper | 21 March 2012
Combining micro- and nano-texture to fabricate an antireflective layer
Mohammad Malekmohammad, Mohammad Soltanolkotabi, Mohammad Naderi, Reza Asadi, Alireza Erfanian, M. Zahedinejad, Mahdi Khaje, Shahin Bagheri
JM3, Vol. 11, Issue 1, 013011, (March 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.013011
KEYWORDS: Silicon, Reflectivity, Antireflective coatings, Refractive index, Nanolithography, Lithography, Finite-difference time-domain method, Scanning electron microscopy, Polarization, Photonic crystals
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