Dr. Shahzad Akbar
Senior Technologist at Qimonda North America Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Ion implantation, Silicon carbide, Photomasks, Boron, Photoresist materials, Ultraviolet radiation, Diodes, Aluminum, Glasses

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