Shailendra Mishra
Manager at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 21 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Modulation, Sensors, Etching, Silicon, Signal processing, Semiconducting wafers, Yield improvement, Temperature metrology, Plasma

Proceedings Article | 20 March 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Fin field effect transistors, Etching, Particles, Silicon, Semiconducting wafers, Plasma

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Optical lithography, Scanners, Error analysis, Electroluminescence, Photomasks, Critical dimension metrology, Reactive ion etching, Semiconducting wafers, Tolerancing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top