Shakib Morshed
at Auburn Univ
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 January 2011
JM3 Vol. 10 Issue 1
KEYWORDS: Silicon, Polymethylmethacrylate, Lithography, Nanolithography, Reactive ion etching, Etching, Electron beam lithography, Atomic force microscopy, Nanostructures, Scattering

Proceedings Article | 18 May 2006
Proc. SPIE. 6223, Micro (MEMS) and Nanotechnologies for Space Applications
KEYWORDS: Microelectromechanical systems, Sensors, Modal analysis, Finite element methods, Shape analysis, Beam shaping, Biological detection systems, Environmental sensing, Biological weapons, Liquids

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