Dr. Shali Shi
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | October 1, 2008
JM3 Vol. 7 Issue 04
KEYWORDS: Sensors, Silicon, Resistors, Etching, Resistance, Platinum, Titanium, Low pressure chemical vapor deposition, Infrared sensors, Temperature metrology

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