Dr. Shalini Sharma
Staff R&D Engineer at JSR Micro Inc
SPIE Involvement:
Publications (9)

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10958, 109581F (2019) https://doi.org/10.1117/12.2515154
KEYWORDS: Optical lithography, Etching, Argon, Monte Carlo methods, Ion implantation, Photoresist materials, Photomasks, Silicon, Semiconducting wafers, Wet etching

Proceedings Article | 23 March 2012 Paper
Koji Inukai, Shalini Sharma, Hiroki Nakagawa, Makoto Shimizu, Tooru Kimura
Proceedings Volume 8322, 83220X (2012) https://doi.org/10.1117/12.916596
KEYWORDS: Extreme ultraviolet lithography, Radiation effects, Extreme ultraviolet, Polymers, Absorption, Deep ultraviolet, Absorbance, Lithography, Photoresist materials, Light

Proceedings Article | 8 March 2012 Paper
Ken Maruyama, Hiroki Nakagawa, Shalini Sharma, Yoshi Hishiro, Makoto Shimizu, Tooru Kimura
Proceedings Volume 8325, 83250A (2012) https://doi.org/10.1117/12.916555
KEYWORDS: Diffusion, Extreme ultraviolet lithography, Extreme ultraviolet, Line width roughness, Immersion lithography, Optical lithography, Manufacturing, Photomasks, Silicon, Semiconducting wafers

Proceedings Article | 16 April 2011 Paper
Joyce Lowes, Alice Guerrero, Michael Weigand, Carlton Washburn, Charlyn Stroud, Shalini Sharma, David Torres, Mark Slezak, Gary Dabbagh, Cherry Tang
Proceedings Volume 7972, 797227 (2011) https://doi.org/10.1117/12.879464
KEYWORDS: Picosecond phenomena, Photoresist materials, Lithography, Semiconducting wafers, Critical dimension metrology, Photoresist developing, Polymers, Silicon, Reflectivity, Photomasks

Proceedings Article | 8 April 2011 Paper
Kouta Nishino, Ken Maruyama, Tooru Kimura, Toshiyuki Kai, Kentaro Goto, Shalini Sharma
Proceedings Volume 7969, 79692I (2011) https://doi.org/10.1117/12.879430
KEYWORDS: Diffusion, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Line width roughness, Yield improvement, Glasses, Optical lithography, Polymers, Quantum efficiency

Showing 5 of 9 publications
Conference Committee Involvement (3)
Photomask Technology
27 September 2021 | Online Only, United States
Photomask Technology
21 September 2020 | Online Only, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top