Dr. Shamin Ahmad Profile

Dr. Shamin Ahmad

Scientist at Central Electronics Engineering Research Institute

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Publications (2)

Proceedings Article | 16 April 1998 Paper

Glass to silicon anodic bonding

Shamin Ahmad, R. Gopal, M. Mitra, Virendra Dwivedi, Mahesh Kumar

Proceedings Volume 3321, (1998) https://doi.org/10.1117/12.305552

KEYWORDS: Glasses, Silicon, Surface finishing, Semiconducting wafers, Polishing, Silicon carbide, Interfaces, Abrasives, Wafer bonding, Temperature metrology

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Proceedings Article | 16 April 1998 Paper

Anisotropic chemical etching of silicon

Shamin Ahmad, Virendra Dwivedi

Proceedings Volume 3321, (1998) https://doi.org/10.1117/12.305554

KEYWORDS: Annealing, Silicon, Etching, Semiconducting wafers, Low pressure chemical vapor deposition, Scanning electron microscopy, Photomicroscopy, Microelectromechanical systems, Surface micromachining, CMOS technology

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