Dr. Shan Zhang
at Shandong Univ of Science and Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 12, 2018
Proc. SPIE. 10619, 2017 International Conference on Optical Instruments and Technology: Advanced Laser Technology and Applications
KEYWORDS: Lithography, Diffraction, Gaussian beams, Laser applications, Photoresist materials, Objectives, Optical simulations, Binary data, Laser systems engineering, Absorption

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