Mr. Shane Geary Profile

Shane Geary

at Analog Devices BV

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Author

Publications (4)

Proceedings Article | 1 July 2003 Paper

Neural-network-based run-to-run controller using exposure and resist thickness adjustment

Shane Geary, Ronan Barry

Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485298

KEYWORDS: Critical dimension metrology, Neural networks, Feedback control, Evolutionary algorithms, Device simulation, Computer simulations, Process control, Control systems, Manufacturing, Algorithm development

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Proceedings Article | 2 June 2003 Paper

Yield improvement due to edge shot parameter optimization

Owen Joyce, James Thompson, Shane Geary

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485013

KEYWORDS: Semiconducting wafers, Yield improvement, Inspection, Photomasks, Optical lithography, Photoresist materials, Modulation, Reticles, Metals, Photoresist processing

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Proceedings Article | 16 July 2002 Paper

Contrast enhancement materials for yield improvement in submicron i-line lithography

Shane Geary, James Thompson, Elliott Capsuto

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473430

KEYWORDS: Metals, Error analysis, Lithography, Manufacturing, Semiconducting wafers, Photoresist materials, Yield improvement, Thin film coatings, Photoresist processing, Submicron lithography

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Proceedings Article | 2 June 2000 Paper

Quantifying the effect of pattern density on focus offset

Shane Geary, James Thompson

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386513

KEYWORDS: Semiconducting wafers, Metals, Photoresist materials, Reticles, Chemical mechanical planarization, Lithography, Dielectrics, Wafer-level optics, Computer aided design, Sensors

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