Dr. Shang-Chieh Chien Profile

Dr. Shang-Chieh Chien

at Taiwan Semiconductor Manufacturing Co Ltd

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Author

Publications (3)

Proceedings Article | 19 March 2015 Paper

An accurate method to determine the amount of out-of-band light in an EUV scanner

Shinn-Sheng Yu, Yen-Cheng Lu, Chih-Tsung Shih, Chia-Chun Chung, Shang-Chieh Chien, Shun-Der Wu, Norman Chen, Shu-Hao Chang, Hsiang-Yu Chou, Jui-Ching Wu, Tao-Ming Huang, Jack J. H. Chen, Anthony Yen

Proceedings Volume 9422, 94221T (2015) https://doi.org/10.1117/12.2085089

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Photomasks, Optical proximity correction, Reflectivity, Aluminum, Line width roughness, Light, Scanners, Light sources

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Proceedings Article | 1 April 2013 Paper

Quencher distribution engineering of out-of-band insensitive EUV resists: experiments and stochastic simulation

Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Jack J. Chen, Anthony Yen

Proceedings Volume 8679, 867929 (2013) https://doi.org/10.1117/12.2010658

KEYWORDS: Line width roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Stochastic processes, Lithography, Polymers, Contamination, Scanners, Electroluminescence, Statistical modeling

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Proceedings Article | 1 April 2013 Paper

Balancing lithographic performance and resist outgassing in EUV resists

Shu-Hao Chang, Shu-Fang Chen, Ying-Yu Chen, Ming-Chin Chien, Shang-Chieh Chien, Tzu-Lih Lee, Jack J. Chen, Anthony Yen

Proceedings Volume 8679, 86790O (2013) https://doi.org/10.1117/12.2010794

KEYWORDS: Contamination, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Line width roughness, Semiconducting wafers, Scanners, Ruthenium, Polymers, Carbon

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