Shang-Chieh Huang
at NGR Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 11 April 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Databases, Scanners, Distortion, Scanning electron microscopy, Photoresist materials, Line edge roughness, Overlay metrology

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Edge detection, Metrology, Databases, Image processing, Inspection, Scanning electron microscopy, Photoresist materials, Image quality, Critical dimension metrology

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