CONFERENCE PROCEEDINGS
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Shanhua Zhang
at Shanghai Institute of Optics and Fine Mechanics
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Author
Publications (5)
Proceedings Article | 24 July 2018 Paper
Development of latent fingerprint detection based on UV induced fluorescence
Cheng Zhao, Lihua Huang, Liqing Ling, Kai Guo, Jianfeng Qu, Shanhua Zhang, Huijie Huang
Proceedings Volume 10827, 108271Y (2018) https://doi.org/10.1117/12.2326989
KEYWORDS: Luminescence, Ultraviolet radiation, Fluorescence spectroscopy, Image processing, Nondestructive evaluation, Laser scanners, Laser systems engineering, Ultraviolet detectors, Visualization, Photomultipliers
Proceedings Article | 24 November 2016 Paper
Imaging ellipsometer with large field-of-view
Liyuan Gu, Aijun Zeng, Shiyu Hu, Qiao Yuan, Weilin Cheng, Shanhua Zhang, Guohang Hu, Hongbo He, Huijie Huang
Proceedings Volume 10023, 1002315 (2016) https://doi.org/10.1117/12.2247848
KEYWORDS: Optical testing, Thin films, Imaging systems, CCD image sensors, Polarizers, Autocollimators, Spectroscopy, Mineralogy, Chromium, Imaging spectroscopy
Proceedings Article | 31 March 2014 Paper
Illumination system without scanning slit for lithographic tools
Yunbo Zhang, Aijun Zeng, Ying Wang, Mingxing Chen, Shanhua Zhang, Qiao Yuan, Huijie Huang
Proceedings Volume 9052, 90522H (2014) https://doi.org/10.1117/12.2046303
KEYWORDS: Micromirrors, Lithographic illumination, Lithography, Mirrors, Photomasks, Microlens array, Control systems, 193nm lithography, Optical scanning systems, Optical simulations
Proceedings Article | 31 December 2013 Paper
Design of zoom system for pupil shaping of lithography tool
Ruifang Fang, Aijun Zeng, Shanhua Zhang, Huijie Huang
Proceedings Volume 9042, 90420J (2013) https://doi.org/10.1117/12.2033627
KEYWORDS: Zoom lenses, Lithography, Diffractive optical elements, Imaging systems, Lithographic illumination, Lenses, Axicons, Distortion, Resolution enhancement technologies, Zemax
Proceedings Article | 12 April 2013 Paper
Design and simulation of illuminator with micro scanning slit array for NA 0.75 lithography system
Linglin Zhu, Aijun Zeng, Shanhua Zhang, Ruifang Fang, Huijie Huang
Proceedings Volume 8683, 86832G (2013) https://doi.org/10.1117/12.2011525
KEYWORDS: Fiber optic illuminators, Photomasks, Lithography, Diffractive optical elements, Zoom lenses, Axicons, Lenses, Optical lithography, Staring arrays, Lithographic illumination
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