Shanhua Zhang
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Visualization, Image processing, Ultraviolet radiation, Luminescence, Photomultipliers, Fluorescence spectroscopy, Nondestructive evaluation, Laser scanners, Ultraviolet detectors, Laser systems engineering

PROCEEDINGS ARTICLE | November 24, 2016
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Thin films, Imaging systems, Spectroscopy, Imaging spectroscopy, Chromium, Polarizers, Optical testing, Autocollimators, CCD image sensors, Mineralogy

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Mirrors, Microlens array, Lithographic illumination, Control systems, Micromirrors, Photomasks, Optical simulations, Optical scanning systems, 193nm lithography

PROCEEDINGS ARTICLE | December 31, 2013
Proc. SPIE. 9042, 2013 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
KEYWORDS: Zemax, Lithography, Axicons, Lithographic illumination, Diffractive optical elements, Imaging systems, Lenses, Distortion, Zoom lenses, Resolution enhancement technologies

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Staring arrays, Lithography, Axicons, Optical lithography, Lithographic illumination, Diffractive optical elements, Lenses, Photomasks, Zoom lenses, Fiber optic illuminators

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