Dr. Shao-Ze Tseng
at National Central Univ
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 11 March 2013
Mei-Ling Lo, Wen-Hsin Li, Shao-Ze Tseng, Sheng-Hui Chen, Chia-Hua Chan, Cheng-Chung Lee
JNP, Vol. 7, Issue 01, 073597, (March 2013) https://doi.org/10.1117/12.10.1117/1.JNP.7.073597
KEYWORDS: Optical spheres, Multilayers, Silicon, Atomic layer deposition, Etching, Scanning electron microscopy, Tantalum, Photonic crystals, Plasma etching, Refractive index

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