Dr. Sharad Saxena
at PDF Solutions Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 July 2003
Proc. SPIE. 5042, Design and Process Integration for Microelectronic Manufacturing
KEYWORDS: Statistical analysis, Manufacturing, Process control, Transistors, Field effect transistors, Statistical modeling, System on a chip, Device simulation, Instrument modeling, Design for manufacturability

Proceedings Article | 27 August 1997
Proc. SPIE. 3212, Microelectronic Device Technology
KEYWORDS: Manufacturing, Reliability, Process control, Microelectronics, Transistors, Optimization (mathematics), Semiconducting wafers, Stochastic processes, Process modeling, Design for manufacturability

Proceedings Article | 16 September 1994
Proc. SPIE. 2336, Manufacturing Process Control for Microelectronic Devices and Circuits
KEYWORDS: Tungsten, Chemical vapor deposition, Process control, Optimization (mathematics), Feedback control, Semiconducting wafers, Wafer testing, Performance modeling, Model-based design, Process modeling

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