Dr. Shaun R. Berry
at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 19 November 2019
JM3 Vol. 18 Issue 04
KEYWORDS: Photomasks, Optical lithography, Etching, Microsystems, Grayscale lithography, Device simulation, Photoresist processing, Photoresist materials, Liquids, Lithography

Proceedings Article | 19 September 2016
Proc. SPIE. 9974, Infrared Sensors, Devices, and Applications VI
KEYWORDS: Microbolometers, Thermography, Infrared imaging, Visible radiation, Birefringence, Imaging systems, Sensors, Silicon, Transducers, Liquid crystals

Proceedings Article | 13 March 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Microlens array, Lenses, Quartz, Electrodes, Metals, Dielectrics, Wavefronts, Microlens, Liquid lenses, Liquids

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