Dr. Shayak Banerjee
at GlobalFoundries
SPIE Involvement:
Publications (9)

Proceedings Article | 9 September 2013 Paper
Dongbing Shao, Bidan Zhang, Shayak Banerjee, Hong Kry, Anuja De Silva, Ranee Kwong, Kisup Chung, Yea-Sen Lin, Alan Leslie
Proceedings Volume 8880, 88802L (2013) https://doi.org/10.1117/12.2029356
KEYWORDS: Critical dimension metrology, Silicon, Etching, Semiconducting wafers, Optical proximity correction, Reflectivity, Near field optics, Computational lithography, Optical lithography, Data modeling

SPIE Journal Paper | 11 June 2013
Shayak Banerjee, Kanak Agarwal, Michael Orshansky
JM3, Vol. 12, Issue 02, 023014, (June 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.023014
KEYWORDS: Optical proximity correction, Photomasks, Nanoimprint lithography, Lithography, Detection and tracking algorithms, Optimization (mathematics), Metals, Semiconducting wafers, Photovoltaics, Source mask optimization

Proceedings Article | 29 March 2013 Paper
Shayak Banerjee, Kanak Agarwal
Proceedings Volume 8684, 868405 (2013) https://doi.org/10.1117/12.2011532
KEYWORDS: Diffraction, Lithography, Optical proximity correction, Model-based design, Source mask optimization, Fourier transforms, Photomasks, Detection and tracking algorithms, Nanoimprint lithography, Resolution enhancement technologies

SPIE Journal Paper | 13 February 2013
Shayak Banerjee, Kanak Agarwal, Sani Nassif, Michael Orshansky
JM3, Vol. 12, Issue 01, 013014, (February 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.1.013014
KEYWORDS: Tolerancing, Transistors, Lithography, Optical proximity correction, Photomasks, Logic, Critical dimension metrology, Manufacturing, Photovoltaics, Image processing

Proceedings Article | 4 April 2011 Paper
Kanak Agarwal, Shayak Banerjee
Proceedings Volume 7974, 79740F (2011) https://doi.org/10.1117/12.879531
KEYWORDS: Optical proximity correction, Nanoimprint lithography, Lithography, Photomasks, Model-based design, Metals, Image processing, Resolution enhancement technologies, Detection and tracking algorithms, Integrated modeling

Showing 5 of 9 publications
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