Prof. Sheila Gonzalez-Castilla
at Univ Politécnica de Madrid
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 May 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Oxides, Silica, Etching, Sputter deposition, Silicon, Oxygen, Silicon films, Surface micromachining, Absorption

Proceedings Article | 21 April 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Avalanche photodetectors, Capacitors, Resonators, Sensors, Electrodes, Dielectrics, Photodiodes, Laser interferometry, Bridges, Aluminum nitride

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