Dr. Shen-Huei Sun
at Institut für Mikroelektronik Stuttgart
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 2, 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Refractive index, Visible radiation, Electrodes, Polymers, Metals, Silicon, Silver, Coating, Manufacturing, Chemical vapor deposition, Platinum, Printing, Ion implantation, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Deposition processes, Semiconducting wafers, Radiation thermography

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