Mr. Sheng Liu
at New Jersey Institute of Technology
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 18, 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Capacitors, Silica, Sensors, Etching, Metals, Silicon, Silicon films, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Reactive ion etching

PROCEEDINGS ARTICLE | February 12, 2008
Proc. SPIE. 6886, Microfluidics, BioMEMS, and Medical Microsystems VI
KEYWORDS: Optical lithography, Capacitors, Silica, Sensors, Metals, Silicon, Finite element methods, Photomasks, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition

PROCEEDINGS ARTICLE | August 30, 2004
Proc. SPIE. 5406, Infrared Technology and Applications XXX
KEYWORDS: Staring arrays, Indium gallium arsenide, Capacitors, Modulation, Sensors, Physics, Amplifiers, Phase shift keying, Detector arrays, Signal detection

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