Dr. Shengli Fan
Senior Design Engineer at ASML
SPIE Involvement:
Area of Expertise:
Computational Lithography , Computational Imaging , Optical Imaging , Diffraction Tomography , Inverse Scattering & Reconstruction Algorithm , Biological and Biomedical Imaging
Profile Summary

My previous research work includes optical diffraction tomography, aiming at the reconstruction of multiply-scattering objects. Now I am a design engineer, focusing on computational lithography. The areas I am interested in are source-mask optimization, optical proximity correction, optical imaging formation, EUV optics.
Publications (4)

Proceedings Article | 5 March 2021 Presentation
Axel Schülzgen, Jian Zhao, Shengli Fan, Jose Enrique Antonio-Lopez, Rodrigo Amezcua Correa, Xiaowen Hu
Proceedings Volume 11703, 117030Q (2021) https://doi.org/10.1117/12.2578621
KEYWORDS: Optical fibers, Imaging systems, Image restoration, Image classification, Tissues, Spatial resolution, Microscopy, Medical research, Medical diagnostics, In vivo imaging

Proceedings Article | 11 March 2020 Presentation
Proceedings Volume 11249, 112490D (2020) https://doi.org/10.1117/12.2546625
KEYWORDS: Tomography, Diffraction, Optical tomography, Algorithm development, Sensors, Detection and tracking algorithms, Reconstruction algorithms, Phase imaging, 3D image processing, 3D metrology

Proceedings Article | 11 March 2020 Presentation
Proceedings Volume 11249, 112490E (2020) https://doi.org/10.1117/12.2544010
KEYWORDS: Diffraction, Optical tomography, Tomography, Reconstruction algorithms, Detection and tracking algorithms, Optimization (mathematics), Optical imaging, Biomedical optics, Multiple scattering, Scattering

SPIE Journal Paper | 1 August 2013 Open Access
Wenjun Liu, Gang Yang, Xiang Lin, Lihui Pang, Shengli Fan
OE, Vol. 52, Issue 08, 087103, (August 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.8.087103
KEYWORDS: Solitons, Spatial solitons, Lithium, Crystals, Diffraction, Optical engineering, Femtosecond phenomena, Nonlinear optics, Laser crystals, Second-harmonic generation

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