Shi Feng
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 January 2019
Proc. SPIE. 11052, Third International Conference on Photonics and Optical Engineering
KEYWORDS: Ion beams, Ion beam finishing, Ions, Optical components, Beam analyzers, Surface finishing, Optical testing

Proceedings Article | 16 January 2019
Proc. SPIE. 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Ion beams, Optical components, Sputter deposition, Ions, Silicon films, Deposition processes, Silica, Reflectivity, Silicon, Polishing

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