Mr. Shi Chang Shi
at Univ of Hong Kong
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 3, 2004
Proc. SPIE. 5379, Design and Process Integration for Microelectronic Manufacturing II
KEYWORDS: Lithography, MATLAB, Optical lithography, Metals, Image segmentation, Image quality, Photomasks, Optical proximity correction, SRAF, Computer aided design

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