Prof. Shiban Kishen Koul
Professor at Indian Institute of Technology Delhi
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 31, 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Etching, Sputter deposition, Dielectrics, Silicon, Silicon films, Antennas, Microwave radiation, Ka band, Semiconducting wafers

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