Dr. Shibing Wang
SPIE Involvement:
Publications (4)

Proceedings Article | 22 February 2021 Poster + Paper
Proceedings Volume 11613, 116130Y (2021) https://doi.org/10.1117/12.2584692
KEYWORDS: Calibration, Machine learning, Signal processing, Physics, Optical proximity correction, Metrology, Lithography, Computational lithography

Proceedings Article | 20 March 2018 Presentation + Paper
Shibing Wang, Stanislas Baron, Nishrin Kachwala, Chidam Kallingal, Dezheng Sun, Vincent Shu, Weichun Fong, Zero Li, Ahmad Elsaid, Jin-Wei Gao, Jing Su, Jung-Hoon Ser, Quan Zhang, Been-Der Chen, Rafael Howell, Stephen Hsu, Larry Luo, Yi Zou, Gary Zhang, Yen-Wen Lu, Yu Cao
Proceedings Volume 10587, 105870N (2018) https://doi.org/10.1117/12.2299421
KEYWORDS: SRAF, Machine learning, Optical proximity correction, Photomasks, Lithography, Model-based design, Source mask optimization, Computational lithography, Image processing

Proceedings Article | 16 October 2017 Presentation + Paper
Shibing Wang, Jing Su, Quan Zhang, Weichun Fong, Dezheng Sun, Stanislas Baron, Cuiping Zhang, Chenxi Lin, Been-Der Chen, Rafael Howell, Stephen Hsu, Larry Luo, Yi Zou, Yen-Wen Lu, Yu Cao
Proceedings Volume 10451, 104510D (2017) https://doi.org/10.1117/12.2283493
KEYWORDS: SRAF, Machine learning, Lithography, Photomasks, Optical proximity correction, Model-based design, Computational lithography, Data modeling, Image processing

Proceedings Article | 18 March 2016 Paper
Proceedings Volume 9776, 97761S (2016) https://doi.org/10.1117/12.2220025
KEYWORDS: Neodymium, Photomasks, Semiconducting wafers, Extreme ultraviolet, Image processing, Lithography, Lithographic illumination, Extreme ultraviolet lithography, Optical proximity correction, Atrial fibrillation, Reticles, Printing, Deep ultraviolet

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