Prof. Shichang Zou
at Shanghai Institute of Microsystem and Information
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | May 5, 2014
OE Vol. 53 Issue 05
KEYWORDS: Photodetectors, Silicon, Indium gallium arsenide, Waveguides, Absorption, Optical instrument design, Interfaces, Germanium, Optical engineering, Silicon photonics

SPIE Journal Paper | June 3, 2013
OE Vol. 52 Issue 06
KEYWORDS: Reflectivity, Nanoparticles, Reflectors, Particles, Gallium nitride, Tolerancing, Diffraction, Silver, Reflection, Optical components

PROCEEDINGS ARTICLE | November 28, 2011
Proc. SPIE. 8308, Optoelectronic Materials and Devices VI
KEYWORDS: Optical fibers, Waveguides, Etching, Interfaces, Silicon, Photomasks, Integrated circuits, Field effect transistors, Semiconducting wafers, Integrated circuit design

SPIE Journal Paper | March 1, 2009
OE Vol. 48 Issue 03
KEYWORDS: Waveguides, Silicon, Semiconducting wafers, Anisotropic etching, Etching, Dry etching, Scanning electron microscopy, Photomasks, Single mode fibers, Optical lithography

PROCEEDINGS ARTICLE | September 25, 1996
Proc. SPIE. 2894, Detectors, Focal Plane Arrays, and Applications
KEYWORDS: Infrared detectors, Semiconductors, Refractive index, Quantum wells, Metals, Quantum efficiency, Absorption

PROCEEDINGS ARTICLE | October 26, 1994
Proc. SPIE. 2364, Second International Conference on Thin Film Physics and Applications
KEYWORDS: Thin films, Chemical species, Sputter deposition, Crystals, Ions, Silicon, Computer simulations, Ion beams, Ion implantation, Tin

Showing 5 of 8 publications
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