Dr. Shifang Li
Sr. Dir. of Technology at KLA Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Modulation, Copper, Inspection, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Chemical mechanical planarization, Back end of line, Defect inspection

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Cadmium, Data modeling, Quartz, Pellicles, Scatterometry, Photomasks, Critical dimension metrology, Semiconducting wafers, Scatter measurement

Proceedings Article | 2 November 2000 Paper
Proc. SPIE. 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
KEYWORDS: Oxides, Sputter deposition, Dielectrics, Interfaces, Silicon, Transmission electron microscopy, Spectroscopic ellipsometry, Silicates, Hafnium, Semiconducting wafers

Proceedings Article | 12 December 1994 Paper
Proc. SPIE. 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements
KEYWORDS: Microscopes, Diffraction, Fringe analysis, Scattering, Interferometers, Chemical species, Photons, Laser scattering, Interferometry, Diffraction gratings

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