Dr. Shigeki Matsuo Profile

Dr. Shigeki Matsuo

at Shibaura Institute of Technology

SPIE Involvement:

Author

Publications (25)

Proceedings Article | 7 June 2005 Paper

Anisotropic etching of dielectrics exposed by high intensity femtosecond pulses

Saulius Juodkazis, Yuusuke Tabuchi, Takahiro Ebisui, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 5850, (2005) https://doi.org/10.1117/12.633670

KEYWORDS: Wet etching, Sapphire, Etching, Glasses, Dielectrics, Crystals, Plasma, Anisotropy, Femtosecond phenomena, Quartz

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Proceedings Article | 8 October 2004 Paper

Three-dimensional recording and structuring of chalcogenide glasses by femtosecond pulses

Saulius Juodkazis, Toshiaki Kondo, Andrei Rode, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.596322

KEYWORDS: Glasses, Optical fibers, Holography, Diffraction, Holograms, Crystals, Diffraction gratings, Refractive index, Objectives, Femtosecond phenomena

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SPIE Journal Paper | 1 April 2004

Glass cutting by femtosecond pulsed irradiation

Egidijus Vanagas, Jouji Kawai, Dmitry Tuzhilin, Igor Kudryashov, Atsushi Mizuyama, Kazutaka Nakamura, Ken-ichi Kondo, Shin-ya Koshihara, Masaki Takesada, Kazunari Matsuda, Saulius Juodkazis, Vygandas Jarutis, Shigeki Matsuo, Hiroaki Misawa

JM3, Vol. 3, Issue 02, (April 2004) https://doi.org/10.1117/12.10.1117/1.1668274

KEYWORDS: Glasses, Quartz, Femtosecond phenomena, Laser cutting, Scanning electron microscopy, Plasma, Laser ablation, Distortion, Absorption, Dielectric breakdown

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Proceedings Article | 19 November 2003 Paper

Three-dimensional optical data storage in a nail for new data transportation

Akihiro Takita, Hirotsugu Yamamoto, Yoshio Hayasaki, Nobuo Nishida, Mitsuru Watanabe, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.531112

KEYWORDS: 3D optical data storage, Microscopes, Optical storage, Data storage, Femtosecond phenomena, Pulsed laser operation, Laser systems engineering, Optical recording, Confocal microscopy, Surface roughness

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Proceedings Article | 14 November 2003 Paper

Three-dimensional holographic recording by femtosecond pulses

Saulius Juodkazis, Toshiaki Kondo, Slava Dubikovski, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 5147, (2003) https://doi.org/10.1117/12.537663

KEYWORDS: Glasses, Holography, Electrons, Objectives, Holograms, Femtosecond phenomena, Crystals, Oscillators, Scanning electron microscopy, Indium nitride

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Proceedings Article | 17 October 2003 Paper

Three-dimensional recording by femtosecond pulses in dielectrics

Saulius Juodkazis, Toshiaki Kondo, Vygantas Mizeikis, Shigeki Matsuo, Hiroyuki Murata, Hiroaki Misawa

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479405

KEYWORDS: Holography, Photoresist materials, Dielectrics, Refractive index, Diamond, Absorption, Photonic crystals, Glasses, Beam splitters, Fabrication

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Proceedings Article | 19 February 2003 Paper

Laser manipulation of bio/biomimetic materials

Toru Takasone, Saulius Juodkazis, Shigeki Matsuo, Akira Yamaguchi, Keiji Sasaki, Jun-ichi Hotta, Hiroaki Misawa

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486512

KEYWORDS: Particles, Light scattering, Optical trapping, Glasses, Gold, Molecules, Silica, Laser scattering, Microfabrication, Electroluminescence

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Proceedings Article | 21 June 2002 Paper

Surface plasmon resonance imaging of Au nanoparticle-modified DNA monolayers

Akira Yamaguchi, Masayuki Hayashida, Saulius Juodkazis, Yoichiro Hara, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 4626, (2002) https://doi.org/10.1117/12.491216

KEYWORDS: Gold, Particles, Molecules, Atomic force microscopy, Signal processing, Surface plasmons, Thin films, Spectroscopy, Signal detection, Refractive index

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Proceedings Article | 18 June 2002 Paper

Microfabrication by a high-fluence femtosecond exposure: mechanism and applications

Mitsuru Watanabe, Saulius Juodkazis, Junji Nishii, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 4637, (2002) https://doi.org/10.1117/12.470618

KEYWORDS: Glasses, Silica, Plasma, Electrons, Microscopes, Microfabrication, Femtosecond phenomena, 3D microstructuring, Optical damage, Laser ablation

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Proceedings Article | 29 May 2002 Paper

Coherence, relaxation, and reaction of solution-phase molecules studied by femtosecond nonlinear spectroscopy: vibrational coherence observed in the third-order optical process

Tahei Tahara, Satoshi Takeuchi, Satoru Fujiyoshi, Shigeki Matsuo

Proceedings Volume 4752, (2002) https://doi.org/10.1117/12.469096

KEYWORDS: Intelligence systems, Absorption, Spectroscopy, Molecules, Raman spectroscopy, Picosecond phenomena, Coherence (optics), Femtosecond phenomena, Molecular spectroscopy, Raman scattering

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Proceedings Article | 30 April 2002 Paper

Stereolithography and 3D microstructuring of transparent materials by femtosecond laser irradiation

Saulius Juodkazis, Makoto Horyama, Masafumi Miwa, Mitsuru Watanabe, Andrius Marcinkevicius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 4644, (2002) https://doi.org/10.1117/12.464145

KEYWORDS: Silica, Glasses, Absorption, Femtosecond phenomena, Plasma, Picosecond phenomena, Electrons, Pulsed laser operation, Microfabrication, Liquids

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Proceedings Article | 25 April 2002 Paper

Fabrication of three-dimensional photonic crystals by femtosecond laser interference

Shigeki Matsuo, Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa

Proceedings Volume 4655, (2002) https://doi.org/10.1117/12.463891

KEYWORDS: Photonic crystals, Dielectrics, Femtosecond phenomena, Scanning electron microscopy, Refractive index, Diamond, Photoresist materials, Beam splitters, Numerical simulations, Fabrication

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Proceedings Article | 29 June 2001 Paper

Fabrication of 3D interconnected network of microchannels inside silica by femtosecond irradiation and etching

Andrius Marcinkevicius, Saulius Juodkazis, Vygantas Mizeikis, Mitsuru Watanabe, Shigeki Matsuo, Junji Nishii, Hiroaki Misawa

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432543

KEYWORDS: Etching, Silica, Glasses, Femtosecond phenomena, Microfabrication, HF etching, Hydrogen fluoride lasers, Diffusion, Fabrication, Luminescence

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Proceedings Article | 29 June 2001 Paper

Time-resolved study of femtosecond microfabrication in silica glass

Hiroaki Misawa, Saulius Juodkazis, Andrius Marcinkevicius, Mitsuru Watanabe, Vygantas Mizeikis, Shigeki Matsuo

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432501

KEYWORDS: Silica, Electrons, Ionization, Picosecond phenomena, Refractive index, Microscopes, Plasma, Femtosecond phenomena, Objectives, Absorption

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Proceedings Article | 21 May 2001 Paper

Studies of enzyme electrode and its response using alkanethiols materials

Shigeki Joko, Shinya Komatsu, Jin Peng, Masahiro Shiota, Fumika Oi, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 4265, (2001) https://doi.org/10.1117/12.427970

KEYWORDS: Electrodes, Glucose, Gold, Self-assembled monolayers, Metals, Potassium, Calibration, Sensors, Surface properties, Biosensors

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Proceedings Article | 12 April 2001 Paper

Application of femtosecond Bessel-Gauss beam in microstructuring of transparent materials

Andrius Marcinkevicius, Saulius Juodkazis, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 4271, (2001) https://doi.org/10.1117/12.424689

KEYWORDS: Axicons, Gaussian beams, Silica, Microfabrication, Beam propagation method, Femtosecond phenomena, Bessel beams, Glasses, Sapphire, Laser beam propagation

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Proceedings Article | 12 April 2001 Paper

Subpicosecond optical damaging of silica: time-resolved measurements of the light-induced damage threshold

Saulius Juodkazis, Andrius Marcinkevicius, Mitsuru Watanabe, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425013

KEYWORDS: Silica, Electrons, Ionization, Microscopes, Absorption, Laser damage threshold, Picosecond phenomena, Plasma, Objectives, Pulsed laser operation

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Proceedings Article | 8 March 2001 Paper

Submicrometer lithography by near-field optical microscopy

Saulius Juodkazis, Yoshio Arisawa, Shigeki Matsuo, Hiroaki Misawa, Rolandas Tomasiunas, Juozas Vaitkus

Proceedings Volume 4318, (2001) https://doi.org/10.1117/12.417618

KEYWORDS: Lithography, Near field, Lithographic illumination, Optical microscopy, Spatial resolution, Near field optics, Femtosecond phenomena, Fiber couplers, Near field scanning optical microscopy, Thin films

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Proceedings Article | 6 November 2000 Paper

Formation of photonic crystals by femtosecond laser microfabrication

Hiroaki Misawa, Saulius Juodkazis, Hong-Bo Sun, Shigeki Matsuo, Junji Nishii

Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405730

KEYWORDS: Absorption, Photonic crystals, Refractive index, Microfabrication, Fabrication, Dielectrics, Polymerization, Scanning electron microscopy, Chemical species, Femtosecond phenomena

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Proceedings Article | 6 November 2000 Paper

Transient light-induced refractive index change made by laser microfabrication in nitroaniline-doped PMMA film

Kazuhiko Yamasaki, Saulius Juodkazis, Mitsuru Watanabe, Shigeki Matsuo, Kenji Kamada, Koji Ohta, Hiroaki Misawa

Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405736

KEYWORDS: Polymethylmethacrylate, Refractive index, Optical spheres, Absorption, Microfabrication, Microscopes, Doping, Transmittance, Polymers, Light scattering

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Proceedings Article | 16 August 2000 Paper

GaN surface ablation by femtosecond pulses: atomic force microscopy studies and accumulation effects

Petr Eliseev, Saulius Juodkazis, Tamoya Sugahara, Hong-Bo Sun, Shigeki Matsuo, Shiro Sakai, Hiroaki Misawa

Proceedings Volume 4065, (2000) https://doi.org/10.1117/12.407377

KEYWORDS: Gallium nitride, Laser ablation, Atomic force microscopy, Absorption, Microscopes, Objectives, Laser processing, Laser irradiation, Femtosecond phenomena, Mirrors

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Laser-induced ablation and surface processing are investigated in GaN epitaxial layers irradiated by 130 - 150 fs pulses at wavelength of 398 and 795 nm. These layers are important materials in optoelectronics and microelectronics. GaN is an inert and hard substance with very limited possibility of wet etching. Laser processing seems to be suitable for different steps of fabrication of nitride-based devices (mesa shaping, grooving, scribing, mirror and surface grating preparation, etc.). Atomic force microscopy is used for a high-resolution investigation of initial and irradiated GaN surface. Imperfections of the mirror-like as-grown (0001) surface are identified (monolayer steps, open-core dislocations). The laser-induced damage threshold (LIDT) is determined at 398 and 795 nm. The dependence of LIDT(N) on the number of shots, N, is tested in accordance with the phenomenological relation LIDT(N) equals LIDT(1)N^((gamma -1)) in order to reveal the defects accumulation in an ablation process of GaN surface ((gamma) equals 1 corresponds to an accumulation-free ablation). The damage of GaN is found to be free of accumulation effect at low pulse energy below 0.6 X LIDT(1) at 795 nm and some effect is found at higher energy with (gamma) equals 0.86 at multi-shot irradiation conditions. A successful surface processing of GaN epitaxial layer (grown by MOCVD technique) is demonstrated for a single-pulse laser ablation of a typical energy 4 - 6 times higher than LIDT(1). The ablation depth up to 500 nm is achievable. The edge is almost vertical and the rim of a laser-ablated channel is free of debris and peel-off. There is an experimental evidence of a successful laser processing by two-photon absorption of femtosecond pulses at GaN surface with photon energy in a transmission region of the material. Photoluminescence (PL) of the defect-related Y-band at 550 - 600 nm was not enhanced at the rim of ablated region when energy of ablated pulses was 3 X LIDT(1). The PL of GaN was excited by two-photon absorption of 110 +/- 10 fs illumination at 726 nm.

Proceedings Article | 7 June 2000 Paper

Microfabrication by femtosecond laser irradiation

Hiroaki Misawa, Hong-Bo Sun, Saulius Juodkazis, Mitsuru Watanabe, Shigeki Matsuo

Proceedings Volume 3933, (2000) https://doi.org/10.1117/12.387561

KEYWORDS: Absorption, Silica, Ionization, Microfabrication, Optical storage, Chemical species, Photonic crystals, Microscopes, Objectives, Refractive index

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Proceedings Article | 7 February 2000 Paper

Photonic lattices achieved with high-power femtosecond laser microexplosion in transparent solid materials

Hong-Bo Sun, Ying Xu, Saulius Juodkazis, Kai Sun, Junji Nishii, Yoshihisa Suzuki, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 3888, (2000) https://doi.org/10.1117/12.377009

KEYWORDS: Refractive index, Crystals, Photonic crystals, Femtosecond phenomena, Pulsed laser operation, Solids, Absorption, Silica, Glasses, Semiconductor lasers

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Proceedings Article | 7 February 2000 Paper

Photonic crystal structures with submicrometer spatial resolution achieved by high-power femtosecond laser-induced photopolymerization

Hong-Bo Sun, Ying Xu, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa

Proceedings Volume 3888, (2000) https://doi.org/10.1117/12.377008

KEYWORDS: Photopolymerization, Photonic crystals, Absorption, Pulsed laser operation, Dielectrics, Laser energy, Microfabrication, Spatial resolution, Femtosecond phenomena, Solids

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Proceedings Article | 1 February 2000 Paper

Laser-induced damage threshold and laser processing of GaN

Hong-Bo Sun, Saulius Juodkazis, Petr Eliseev, Tamoya Sugahara, Tao Wang, Shigeki Matsuo, Shiro Sakai, Hiroaki Misawa

Proceedings Volume 3885, (2000) https://doi.org/10.1117/12.376976

KEYWORDS: Gallium nitride, Pulsed laser operation, Laser energy, Laser damage threshold, Laser processing, Laser ablation, Laser induced damage, Atomic force microscopy, Objectives, Femtosecond phenomena

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Showing 5 of 25 publications

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