Prof. Shigeki Mori
at Hitachi Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 22 March 2007 Paper
Proceedings Volume 6519, 65191D (2007) https://doi.org/10.1117/12.711759
KEYWORDS: Lithography, Extreme ultraviolet lithography, Line edge roughness, Extreme ultraviolet, Semiconductors, Molybdenum, Polymers, Inspection, Chromatography, Molecules

Proceedings Article | 20 August 2004 Paper
Shigeki Mori, Akio Sato, Kyoji Nakajo, Masanori Shoji, Naomi Shimada, Hirokazu Sambayashi, Kenzo Goto, Fumio Murai, Hiroshi Fukuda
Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557820
KEYWORDS: Critical dimension metrology, Photomasks, Semiconducting wafers, Projection lithography, Software development, Silicon, Scattering, Monte Carlo methods, Optical proximity correction, Analytical research

Proceedings Article | 28 August 2003 Paper
Fumio Murai, Hiroshi Fukuda, Shigeki Mori, Akio Sato, Kyoji Nakajo
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504235
KEYWORDS: Image classification, Backscatter, Data processing, Optical aberrations, Electron beams, Data corrections, Lithography, Monochromatic aberrations, Double patterning technology, Projection lithography

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