Shigeki Nojima
Chief Specialist at Toshiba Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (40)

PROCEEDINGS ARTICLE | October 12, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Lithography, Design for manufacturing, Machine learning, SRAF, Statistical modeling

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Wafer-level optics, Lithography, Calibration, Computer simulations, Feature extraction, Photomasks, Optical proximity correction, Semiconducting wafers

PROCEEDINGS ARTICLE | July 13, 2017
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Convolutional neural networks, Neural networks, Semiconductor manufacturing

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Wafer-level optics, Lithography, Photovoltaics, Optical lithography, Image processing, Constructive interference, Optical proximity correction, SRAF, Semiconducting wafers, Destructive interference

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Convolutional neural networks, Data modeling, Image processing, Feature extraction, Neural networks, Design for manufacturing, Photomasks, Optical proximity correction, Convolution, Critical dimension metrology, Semiconducting wafers, Computer architecture, Performance modeling

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Etching, Manufacturing, Computer simulations, Feature extraction, Scanning electron microscopy, Photomasks, Semiconducting wafers, 193nm lithography, Simulation of CCA and DLA aggregates

Showing 5 of 40 publications
Conference Committee Involvement (5)
Design-Process-Technology Co-optimization for Manufacturability XIII
27 February 2019 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XII
28 February 2018 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XI
1 March 2017 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability X
24 February 2016 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability IX
25 February 2015 | San Jose, California, United States
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