Dr. Shigenobu Yamanaka
Manager/R&D at Daiken Chemical Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Semiconductors, Carbon, Silicon, Atomic force microscopy, Scanning electron microscopy, Process control, Atomic force microscope, Scanning probe microscopy, Silicon carbide, Carbon nanotubes

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