Shigeru Tahara
at Tokyo Electron Miyagi Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Polymethylmethacrylate, Etching, Polymers, Materials processing, Manufacturing, Inspection, Ecosystems, Directed self assembly, Picosecond phenomena, Semiconducting wafers

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8685, Advanced Etch Technology for Nanopatterning II
KEYWORDS: Optical lithography, Etching, Ions, Chemistry, Magnetism, Ion beams, Wet etching, Plasma etching, Tantalum, Plasma

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Lithography, Polymethylmethacrylate, Etching, Dry etching, Polymers, Chemical vapor deposition, Scanning electron microscopy, Directed self assembly, Wet etching, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top