Dr. Shih-Feng Tseng
Research fellow at Instrument Technology Research Center
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | May 27, 2017
OE Vol. 56 Issue 05
KEYWORDS: Aspheric lenses, Mirrors, Computer generated holography, Manufacturing, Aspheric optics, Optics manufacturing, Calibration, Monochromatic aberrations

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Optomechanical design, Lithography, Monochromatic aberrations, Mirrors, Glasses, Ceramics, Reflectivity, Wavefronts, Adaptive optics, Distortion, Optical fabrication, Computer generated holography, Wavefront distortions, Optical mounts

PROCEEDINGS ARTICLE | September 2, 2015
Proc. SPIE. 9573, Optomechanical Engineering 2015
KEYWORDS: Optical design, Polishing, Interferometers, Lens design, Optical testing, Image quality, Spherical lenses, Laser optics, Tolerancing, Surface finishing

PROCEEDINGS ARTICLE | July 17, 2015
Proc. SPIE. 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015)
KEYWORDS: Monochromatic aberrations, Mirrors, Polishing, Optical spheres, Calibration, Wavefronts, Computer generated holography, Aspheric optics, Aspheric lenses, Surface finishing

SPIE Journal Paper | July 22, 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Photoresist materials, Oxides, Sapphire, Lithography, Plasma, Etching, Crystals, Laser development, Oxygen, Chlorine

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Oxides, Lithography, Etching, Crystals, Laser development, Oxygen, Photoresist materials, Sapphire, Chlorine, Plasma

Showing 5 of 7 publications
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