Dr. Shih-Liang Ku
Optics Group Leader
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 February 2010
Proc. SPIE. 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
KEYWORDS: Antireflective coatings, Etching, Ions, Coating, Reflectivity, Surface roughness, Platinum, Ion beams, Transmittance, Positron emission tomography

SPIE Journal Paper | 1 July 2009
OE Vol. 48 Issue 07
KEYWORDS: Etching, Thin films, Photonic crystals, Multilayers, Ions, Thin film deposition, Molecular self-assembly, Tantalum, Process modeling, Particles

Proceedings Article | 29 August 2008
Proc. SPIE. 7067, Advances in Thin-Film Coatings for Optical Applications V
KEYWORDS: Thin films, Refractive index, Spectroscopy, Ions, Silicon, Transmission electron microscopy, Infrared spectroscopy, Silicon films, Infrared radiation, Absorption

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