Shih-Lung Tsai
Project Manager at Macronix International Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Data modeling, Calibration, Image processing, Error analysis, Feature extraction, Scanning electron microscopy, Photomasks, Optical proximity correction, Wafer testing, Process modeling

Proceedings Article | 7 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Mathematical modeling, Lithography, Optical lithography, Calibration, Photoresist materials, Image transmission, Photomasks, Optical proximity correction, Systems modeling, Process modeling

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