Mr. Shih-Ping Lu Profile

Shih-Ping Lu

at Rexchip Electronics Corp

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Publications (2)

Proceedings Article | 28 June 2013 Paper

Mask degradation monitoring with aerial mask inspector

Wen-Jui Tseng, Yung-Ying Fu, Shih-Ping Lu, Ming-Sian Jiang, Jeffrey Lin, Clare Wu, Sivan Lifschitz, Aviram Tam

Proceedings Volume 8701, 87010B (2013) https://doi.org/10.1117/12.2028101

KEYWORDS: Photomasks, Air contamination, Inspection, Semiconducting wafers, Wafer inspection, Scanning electron microscopy, Printing, Signal detection, Particles, Semiconductor manufacturing

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Proceedings Article | 17 October 2008 Paper

An effective haze monitoring method

Shih-Ping Lu, Shean-Hwan Chiou, Wen-Jui Tseng

Proceedings Volume 7122, 71223L (2008) https://doi.org/10.1117/12.801429

KEYWORDS: Inspection, Air contamination, Photomasks, Dysprosium, Chromium, Semiconducting wafers, Defect detection, Reliability, Deep ultraviolet, Particles

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