Mr. Shijie Zhao Profile

Shijie Zhao

at China Academy of Engineering Physics

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 4 March 2024 Paper

Effects of disk size and position on material removal characteristic on double-sided polishing

Siling Huang, Hailin Guo, Shiyan Zhao, Xu Zhang, Chaoxiang Xia, Shijie Zhao, Dasen Wang

Proceedings Volume 13070, 130700D (2024) https://doi.org/10.1117/12.3014239

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Proceedings Article | 27 January 2023 Paper

Study on removal characteristics of double-sided rapid polishing machine

Hailin Guo, Dasen Wang, Shijie Zhao, Siling Huang, Chaoxiang Xia, Xu Zhang

Proceedings Volume 12550, 125501U (2023) https://doi.org/10.1117/12.2666595

KEYWORDS: Polishing, Surface finishing, Polishing equipment, Optical components, Abrasives, Particles, Shape analysis, Manufacturing

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Proceedings Article | 13 December 2021 Paper

Investigation on surface figure control technology of medium-aperture optical component based on double-sided polishing

Ming-zhuang Zhang, Shi-jie Zhao, Liang Tian, Rui-qing Xie

Proceedings Volume 12071, 120710D (2021) https://doi.org/10.1117/12.2604933

KEYWORDS: Polishing, Optical components, Surface finishing, Abrasives, Particles, Sun, Control systems, Surface roughness, Photovoltaics, Motion models

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Proceedings Article | 13 December 2021 Paper

Suppressing the edge roll off in continuous polishing of large planar optics by using extension blocks

Lele Ren, Feihu Zhang, Defeng Liao, Ruiqing Xie, Shijie Zhao, Jian Wang

Proceedings Volume 12072, 120720L (2021) https://doi.org/10.1117/12.2604437

KEYWORDS: Polishing, Surface finishing, Interfaces, Semiconducting wafers, Polyurethane, Chemical mechanical planarization, Analytical research, Telescopes, Silica, Polishing equipment

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SPIE Journal Paper | 1 December 2021

Flatness on-machine measurement system of chemical mechanical polishing process for large-caliber tin plates

Chupeng Zhang, Zhenghao Deng, Shijie Zhao, Linxiao Yang, Xiuhong Li

OE, Vol. 60, Issue 12, 124103, (December 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.12.124103

KEYWORDS: Tin, Chemical mechanical planarization, Error analysis, Sensors, Diamond, Surface finishing, Kinematics, Chemical reactions, Polishing, Optical engineering

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