Dr. Shikha Somani
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Semiconductors, Data mining, Lithography, Databases, Metals, Silicon, Manufacturing, Computer simulations, Mining, Design for manufacturing, Machine learning, Semiconductor manufacturing, Image classification, Charge-coupled devices, Optical proximity correction, Design for manufacturability

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Data mining, Statistical analysis, Data modeling, Visualization, Data storage, Databases, Metals, Data processing, Profiling, Very large scale integration

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Photovoltaics, Optical lithography, Data modeling, Very large scale integration, Photomasks, Image classification, Optical proximity correction, SRAF, Model-based design, Library classification systems

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Wafer-level optics, Defect detection, Metals, Computer simulations, Bridges, Very large scale integration, Image classification, Acquisition tracking and pointing, Semiconducting wafers, Optics manufacturing

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Lithography, Logic, Computer simulations, Very large scale integration, Photomasks, Image classification, Optical proximity correction, Optics manufacturing, Model-based design, Library classification systems

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Ions, Profiling, Photomasks, Image classification, Optical proximity correction, Critical dimension metrology, Structural design, Neodymium, Product engineering, Library classification systems

Showing 5 of 6 publications
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