Shimon Levi
at Applied Materials Israel Ltd
SPIE Involvement:
Publications (38)

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12053, PC120530C (2022)
KEYWORDS: Critical dimension metrology, Metrology, Scanning electron microscopy, Photoresist materials, Optical proximity correction, Process modeling, Data modeling, Photomasks, Lithography, Extreme ultraviolet lithography

Proceedings Article | 5 March 2021 Presentation
Proceedings Volume 11690, 116900K (2021)
KEYWORDS: Silicon photonics, Silicon, Photonics, Optical lithography, Line edge roughness, Wafer-level optics, Metrology, Line width roughness, Semiconducting wafers

Proceedings Article | 25 June 2020 Presentation + Paper
Proceedings Volume 11325, 1132508 (2020)
KEYWORDS: Overlay metrology, Scanning electron microscopy, Scanning transmission electron microscopy, Wafer-level optics, Semiconducting wafers, Line edge roughness, Photomasks, Transmission electron microscopy, Dysprosium, Metrology

Proceedings Article | 27 March 2020 Paper
Proceedings Volume 11324, 1132411 (2020)
KEYWORDS: Silicon, Etching, Atomic force microscopy, HF etching, Nanostructures, Lithography, Silica, Photomasks, Semiconducting wafers, Adsorption

Proceedings Article | 24 March 2020 Presentation + Paper
Proceedings Volume 11325, 1132515 (2020)
KEYWORDS: Overlay metrology, Semiconducting wafers, Scanning electron microscopy, Photomasks, Metrology, Wafer-level optics, Etching, Transmission electron microscopy

Showing 5 of 38 publications
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