Shimon Levi
at Applied Materials Ltd
SPIE Involvement:
Author
Publications (30)

Proceedings Article | 7 May 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Stochastic processes, Metrology, Inspection, Scanning electron microscopy, Critical dimension metrology, Extreme ultraviolet, Error analysis, Defect inspection, Defect detection, Lithography

Proceedings Article | 16 April 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: 3D modeling, Sensors, Scanning electron microscopy, Atomic force microscopy, Metrology, 3D metrology, Signal detection, Calibration, Electrons, Optical proximity correction

Proceedings Article | 2 August 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Extreme ultraviolet, Photomasks, Semiconducting wafers, Signal processing, Transmission electron microscopy, Atomic force microscopy, Etching

Proceedings Article | 19 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Directed self assembly, Metrology, Optical lithography, Etching, Manufacturing, 3D metrology, Materials processing, Polymers, Image processing, Scanning electron microscopy

Proceedings Article | 28 April 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Image processing, 3D metrology, Image quality, Optical lithography, Lithography, Metrology, 3D image processing, Fabrication, Etching, Scanning electron microscopy

Proceedings Article | 27 April 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Image processing, 3D metrology, 3D image processing, Image quality, Lithium, Etching, Lithography, Metrology, Oxides, Digital imaging

Showing 5 of 30 publications
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