Shimon Levi
at Applied Materials Israel Ltd
SPIE Involvement:
Author
Publications (36)

Proceedings Article | 25 June 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Wafer-level optics, Metrology, Scanning electron microscopy, Transmission electron microscopy, Photomasks, Dysprosium, Line edge roughness, Semiconducting wafers, Overlay metrology, Scanning transmission electron microscopy

Proceedings Article | 27 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Lithography, Nanostructures, Silica, Etching, Silicon, Atomic force microscopy, Adsorption, Photomasks, Semiconducting wafers, HF etching

Proceedings Article | 24 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Wafer-level optics, Metrology, Etching, Scanning electron microscopy, Transmission electron microscopy, Photomasks, Semiconducting wafers, Overlay metrology

Proceedings Article | 24 March 2020 Presentation
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV

Proceedings Article | 7 May 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Metrology, Defect detection, Error analysis, Inspection, Scanning electron microscopy, Extreme ultraviolet, Critical dimension metrology, Stochastic processes, Defect inspection

Showing 5 of 36 publications
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