Ms. Shimon Maeda
at Toshiba Corp
SPIE Involvement:
Author
Publications (21)

PROCEEDINGS ARTICLE | March 31, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Nanotechnology, Lithography, Optical microscopes, Optical lithography, Ultraviolet radiation, Design for manufacturing, Artificial intelligence, Double patterning technology, Nanoimprint lithography, Photoresist processing, Scatter measurement, Nanolithography, UV optics, Design for manufacturability

PROCEEDINGS ARTICLE | April 1, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Polymethylmethacrylate, Computational modeling, Silicon, Oxygen, Scanning electron microscopy, Directed self assembly, Immersion lithography, Reactive ion etching

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Semiconductors, Lithography, Optical lithography, Calibration, Ultraviolet radiation, Computer simulations, Design for manufacturing, Double patterning technology, Computational lithography, Nanoimprint lithography, Photoresist processing, Optics manufacturing, Nanolithography, Design for manufacturability

SPIE Journal Paper | August 7, 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Polymethylmethacrylate, Picosecond phenomena, Transmission electron microscopy, Calibration, Process modeling, Computer simulations, Optimization (mathematics), System on a chip, Image processing, Directed self assembly

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Diffraction, Finite-difference time-domain method, Computer simulations, Wave propagation, Finite element methods, Photomasks, Electromagnetism, Radio propagation, Maxwell's equations

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Polymethylmethacrylate, Data modeling, Calibration, Computer simulations, 3D modeling, Transmission electron microscopy, Design for manufacturing, Directed self assembly, Picosecond phenomena, System on a chip

Showing 5 of 21 publications
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